RT Journal Article
SR Electronic
A1 Zahradnicek, Radim
A1 Prokes, Tomas
A1 Benes, Libor
T1 The Graphene Oxide Spincoating Optimalization by Planned Experiment
JF Manufacturing Technology Journal
YR 2017
VO 17
IS 4
SP 635
OP 639
DO 10.21062/ujep/x.2017/a/1213-2489/MT/17/4/635
UL https://journalmt.com/artkey/mft-201704-0039.php
AB Spin coating is basic method for preparation of thin polymer resist layer (polycarbonate) or colloidal solution (grapheme oxide in alcohol). This method main benefits are speed of preparation and the possibility of tuning final coating of silicon sample by variations of parameters such as the speed of rotation, time and the amount of the solution. To find out the exact graphene oxide layer spin coating process a planned experiment was designed. The greatest coverage of the silicon sample grapheme was obtained by studying the data obtained from electron microscopy (SEM) and light microscopy (LM) of the spin coating input conditions