RT Journal Article SR Electronic A1 Krbata, Michal A1 Fabo, Peter A1 Kohutiar, Marcel A1 Escherova, Jana A1 Kuba, Michal A1 Kianicova, Marta A1 Eckert, Maros T1 Possibilities of Using Impedance Spectroscopy for Indirect Measurements of Thin Layers of Al & Cr-Al Coatings on Ni-based Superalloy Inconel 713LC Applied by the "Out-of-pack" Diffusion Method JF Manufacturing Technology Journal YR 2023 VO 23 IS 3 SP 313 OP 318 DO 10.21062/mft.2023.042 UL https://journalmt.com/artkey/mft-202303-0012.php AB The presented work deals with the research of the super-alloy Inconel 713LC, on which an Al-based coating was applied using the "Out-of-pack" diffusion coating process, or CrAl. In this contribution, the results of measuring the thickness of thin coatings using a confocal laser microscope and the method of impedance spectroscopy are presented and discussed. This can demonstrate the possibility of being used also for researching the properties of thin layers using a VF probe, which, thanks to the use of ferrite, has a practically constant inductance in the entire frequency range, and the presence of a metal sample in the magnetic circuit of the probe was manifested as a result of eddy currents by a significant decrease in the inductance value at higher frequencies. However, the measurements require precise measurement of impedance with an accuracy of 1mΩ and phase angle with an accuracy of 0.001° with high stability of the measuring frequency. For a better assessment of the parameters of the layers, it is necessary to extend the frequency range of the measurement to the range of MHz units.