Manufacturing Technology 2014, 14(3):333-336 | DOI: 10.21062/ujep/x.2014/a/1213-2489/MT/14/3/333

The Usage of Backscattered Electrons in Scanning Electron Microscopy

Pavel Kejzlar1, Martin ©vec2, Eva Macajová2
1 Institute for Nanomaterials, Advanced Technologies and Innovation, Technical University of Liberec. Studentska 1402/2, 461 17 Liberec. Czech Republic
2 Department of Materials Science, Technical University of Liberec, Studentska 1402/2, Liberec, Czech Republic

Secondary and backscaterred electrons are the most common signals used for imaging in the scanning electron microscopy. Generally, SE are used to obtain topographical contrast while BSE show differences in chemical composition (so called Z-contrast).The aim of the present work is to show possibilities and techniques to obtain not-so-common information using BSE, as e.g. orientation contrast, residual stress, different allotropic modifications, etc.

Keywords: Scanning Electron Microscopy, BSE, Structure

Published: October 1, 2014  Show citation

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Kejzlar P, ©vec M, Macajová E. The Usage of Backscattered Electrons in Scanning Electron Microscopy. Manufacturing Technology. 2014;14(3):333-336. doi: 10.21062/ujep/x.2014/a/1213-2489/MT/14/3/333.
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