Manufacturing Technology 2018, 18(6):917-922 | DOI: 10.21062/ujep/201.2018/a/1213-2489/MT/18/6/917

The Influence of CH4/N2 Gas Ratio on the Structure and Chemical Composition of Cr(C, N) Coatings Deposited by CAD Technology

Pavel Kejzlar1, Totka Bakalova1, Nikolay Petkov2, Hristo Bahchedzhiev2
1 Faculty of Mechanical Engineering, Department of Material Science, Technical University of Liberec, Studentska 2, 461 17 Liberec, Czech Republic
2 Central Laboratory of Applied Physics, Bulgarian Academy of Sciences, 61, St. Peterburg Blvd. 4000 Plovdiv, Bulgaria

This article presents the study of the influence of the bias voltage and CH4/N2 gas ratio on the structure and chemical composition of Cr(C,N) coatings. The coatings were deposited by cathodic arc evaporation of pure Cr (99.99 %) cathode under an atmosphere of a mixture of CH4 and N2 gasses at the low deposition temperature of 300 ˚C. The ratio of reactive gasses was changed from 0 to 100 %. Energy-dispersive spectroscopy showed a linear dependence of resulting C/N ratio on the process gas ratio. The roughness of layers prepared from a mixture of process gasses is higher compared to pure gasses.

Keywords: CAD technology, Cr(C,N) coatings, Surface morphology, Roughness

Published: December 1, 2018  Show citation

ACS AIP APA ASA Harvard Chicago IEEE ISO690 MLA NLM Turabian Vancouver
Kejzlar P, Bakalova T, Petkov N, Bahchedzhiev H. The Influence of CH4/N2 Gas Ratio on the Structure and Chemical Composition of Cr(C, N) Coatings Deposited by CAD Technology. Manufacturing Technology. 2018;18(6):917-922. doi: 10.21062/ujep/201.2018/a/1213-2489/MT/18/6/917.
Share...
Download citation
  • BibTeX (.bib)
  • Bookends (.ris)
  • EasyBib (.ris)
  • EndNote (.enw)
  • EndNote 8 (.xml)
  • ISI WoS (.isi)
  • Medlars (.medlars)
  • Mendeley (.ris)
  • MODS (.xml)
  • Papers (.ris)
  • RefWorks (.txt)
  • RefManager (.ris)
  • RIS (.ris)
  • MS Word (.xml)
  • Zotero (.ris)
    • Open full article

    References

    1. GAHLIN, R., BROMARK, M., HEDENQVIST, P., HOGMARK, S., HAKANSSON, G. ®. (1995). Surf. Coat. Technol., 76, p. 174. Go to original source...
    2. BAKALOVA, T., PETKOV, N., BAHCHEDZHIEV, H., KEJZLAR, P., LOUDA, P. (2016). Comparison of mechanical and tribologycal properties of TiCN and CrCN coatings deposited by CAD. Manufacturing technology. 5. vyd. PrintPoint Ltd, Prague: J. E. Purkyne University in Usti nad Labem, roč. 16, č. 5. S. 854 - 858. ISSN 1213-2489. Go to original source...
    3. ALMER, J., ODEN, M., HAKANSSON, G. (2001). Microstructure, stress and mechanical properties of arc-evaporated Cr-C-N coatings. Thin Solid Films, 385, pp. 190-197. Go to original source...
    4. ČEKADA, M., MAČEK, M., MERL, D. K., PANJAN, P. (2003). Thin Solid Films, 433, p. 174. Go to original source...
    5. PETKOV, N., BAKALOVA, T., BAHCHEDZHIEV, H., KEJZLAR P., LOUDA, P., (2017). Influence of Coating Deposition Parameters on the Mechanical and Tribological Properties of TiCN Coatings, Journal of Nano Research, Vol. 49, pp. 98-107. Go to original source...
    6. PETKOV, N., BAKALOVA, T., CHOLAKOVA, T., BAHCHEDZHIEV, H., LOUDA, P., RYSANEK, P., KORMUNDA, M., CAPKOVA, P., KEJZLAR P. (2017). Study of surface morphology, structure, mechanical and tribological properties of an AlSiN coating obtained by the cathodic arc deposition method, Superlattices and Microstructures, Vol. 109, pp. 402 - 413. Go to original source...
    7. PETKOV, N., BAKALOVA, T., BAHCHEDZHIEV, H., LOUDA, P., KEJZLAR P., CAPKOVA, P., KORMUNDA, M., RYSANEK, P., (2018). Cathodic Arc Deposition of TiCN coatings - Influence of the C2H2/N2 Ratio on the Structure and Coating Properties, Journal of Nano Research, ISSN: 1661-9897, Vol. 51, pp. 78 - 91. Go to original source...
    8. https://www.lenntech.com/periodic-chart-elements/ionization-energy.htm
    9. WARCHOLINSKI, B., A. GILEWICZ, J. RATAJSKI, Z. KUKLINSKI a J. ROCHOWICZ. (2012) An analysis of macroparticle-related defects on CrCN and CrN coatings in dependence of the substrate bias voltage, Vacuum, Vol. 86(9), pp.1235-1239 Go to original source...
    10. LEE, Shen-Chih, Wei-Yu HO a F.D. LAI. (1996) Effect of substrate surface roughness on the characteristics of CrN hard film. Materials Chemistry and Physics Vol. 43(3), pp. 266-273 Go to original source...
    11. WARCHOLIŃSKI, B., A. GILEWICZ, Z. KUKLIŃSKI a P. MY¦LIŃSKI. (2008). Arc-evaporated CrC, CrN and CrCN coatings. Vacuum, Vol. 83, pp. 715-718 Go to original source...
    12. KUPRIN, A. S., KOLODIY, I. V., OVCHARENKO, V. D., TOLMACHOVA, G. N., GILEWICZ, A., LUPICKA, O., WARCHOLINSKI, B. (2016). Effect of carbon on the properties of CrN coatings formed by cathodic arc evaporation in stationary system, Problems of Atomic Science and Technology, ISSN: 16829344, Vol. 104, Issue 4, pp. 72-75.

    This is an open access article distributed under the terms of the Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0), which permits non-comercial use, distribution, and reproduction in any medium, provided the original publication is properly cited. No use, distribution or reproduction is permitted which does not comply with these terms.


    Return to the content